Method of manufacturing a capacitor with copper electrodes...

Details Method of manufacturing a capacitor with copper electrodes... Method of manufacturing a capacitor with copper electrodes...

2005-07-26

2005-07-26

Nguyen, Cuong (Department: 2811)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S253000, C438S396000

Reexamination Certificate

active

06921689

ABSTRACT:
A method of manufacturing a capacitor having a couple of electrodes with a dielectric placed therebetween. At least one of the electrodes is made of copper, and barriers for preventing the diffusion of copper into the dielectric are provided between the dielectric and the copper electrode, respectively.

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