X-ray reflectometry with small-angle scattering measurement

Details X-ray reflectometry with small-angle scattering measurement X-ray reflectometry with small-angle scattering measurement

2005-05-17

2005-05-17

Ho, Allen C. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S070000, C378S086000, C378S088000, C378S089000

Reexamination Certificate

active

06895075

ABSTRACT:
Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.

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