Method of manufacturing a reference apparatus

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438275, H01L 21336

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active

059407042

ABSTRACT:
A reference apparatus for determining a current or voltage of a semiconductor device, includes a plurality of reference cells having threshold values different from each other, and a selection circuit for selecting one of the plurality of reference cells. A current flowing in a semiconductor device can be determined by comparing the current flowing in the reference apparatus, with the current flowing in a semiconductor cell by means of a sense amplifier.

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