Coating apparatus – Gas or vapor deposition – With treating means
Patent
1997-03-19
1999-08-17
Breneman, Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118725, 432241, 432250, C23C 1600, F27D 312, F27D 114
Patent
active
059388528
ABSTRACT:
A cap for a vertical furnace includes a first flat plate and a second flat plate separated by a predetermined distance, and a plurality of support rods connecting the first and second flat plates. A plurality of adjacent and horizontally disposed adiabatic plates are vertically stacked between the first and the second flat plates such that edges of the adiabatic plates contact the support rods. The first and second flat plates, adjacent adiabatic plates, and the plurality of support rods are integrally formed in a single structure. Since all the components of the cap are formed in single structure, installation and replacement is simplified and the generation of contamination particles is prevented since no parts need to be repeatedly assembled and disassembled.
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Han O-yeon
Kim Yu-geun
Ko Hyeog-joon
Nam Ki-hum
Breneman Bruce
Lund Jeffrie R
Samsung Electronics Co,. Ltd.
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