4. Heating
  5. Work chamber having heating means
  6. Having means by which work is progressed or moved mechanically

Ki-hum Nam

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Cap for vertical furnace

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Diffusion furnace used for semiconductor device manufacturing pr

Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent

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Thermal processing apparatus for semiconductor wafer

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent

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Profile ID: LFUS-PAI-P-428078

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