Process for preparing negative relief images with cationic photo

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

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Details

430313, 430314, 430322, 430323, 430311, 156643, 1566591, 156904, G03C 500

Patent

active

045514186

ABSTRACT:
Negative relief images are generated by a process comprising the use of cationic polymerization and plasma etching.

REFERENCES:
patent: 4175963 (1979-11-01), Crivello
patent: 4307177 (1981-12-01), Crivello
patent: 4426247 (1984-01-01), Tamamura et al.

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