Foreign matter or abnormal unsmoothness inspection apparatus...

Details Foreign matter or abnormal unsmoothness inspection apparatus... Foreign matter or abnormal unsmoothness inspection apparatus...

2011-08-23

2011-08-23

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C073S001010, C073S081000, C073S083000, C073S105000, C428S408000, C204S192150

Reexamination Certificate

active

08003939

ABSTRACT:
A foreign matter detecting apparatus includes a detecting device for detecting foreign matter by measuring smoothness of a surface of an object undergoing measurement, a marking device for providing a dent on the surface of the object with a predetermined horizontal distance from the foreign matter detected by the detecting device, and a mass spectrum measuring device for irradiating and scanning a small area with a primary ion beam, as a part of the object, including the foreign matter and the dent, so as to measure a mass spectrum of secondary ions emitted from the foreign matter located at a position within a predetermined horizontal distance from the dent.

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