Method and system for extracting ion beams composed of...

Details Method and system for extracting ion beams composed of... Method and system for extracting ion beams composed of...

2011-04-19

2011-04-19

Nguyen, Kiet T (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S3960ML

Reexamination Certificate

active

07928406

ABSTRACT:
A new type of triode extraction system, a Cluster Ion Beam Extraction System, is disclosed for broad energy range cluster ion beam extraction applications while still being applicable to atomic and molecular ion species as well. The extraction aperture plate contours are set to minimize the beam cross over and at the same time shield the source from excess extraction electric fields thus allowing smaller values of the extraction gap. In addition, a novel focusing feature is integrated into these new optics which allows the beam to be either focused or de-focused in the non-dispersive plane by using a bipolar bias voltage of only a few kV over a broad range of beam energy. This is a superior solution to a stand-alone electrostatic lens solution, for example an einzel lens, which would require tens of kV of bias voltage in order to be able to focus an energetic beam.

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ISR (PCT/US08/64475), Aug. 8, 2008, Semequip, Inc.

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