4. Radiant energy
  5. Ion generation
  6. Field ionization type

Sami K. Hahto

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External cathode ion source

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion beam apparatus and method employing magnetic scanning

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and system for extracting ion beams composed of...

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Negative ion source with external RF antenna

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2297480

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