Automatic dynamic baseline creation and adjustment

Details Automatic dynamic baseline creation and adjustment Automatic dynamic baseline creation and adjustment

2011-03-01

2011-03-01

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

C438S009000

Reexamination Certificate

active

07899627

ABSTRACT:
In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline. The method moreover includes including the first signal data in a recalculation of the baseline if the first signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.

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“Written Opinion”, Issue in PCT Application No. PCT/US2007/078574; Mailing Date.: Oct. 30, 2007.
“International Search Report”, Issue in PCT Application No. PCT/US2007/078574; Mailing Date.: Oct. 30, 2007.

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