Microfeature workpieces and methods for forming...

Details Microfeature workpieces and methods for forming... Microfeature workpieces and methods for forming...

2011-01-04

2011-01-04

Zarneke, David A (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C257SE21597

Reexamination Certificate

active

07863187

ABSTRACT:
Methods for forming interconnects in microfeature workpieces, and microfeature workpieces having such interconnects are disclosed herein. The microfeature workpieces may have a terminal and a substrate with a first side carrying the terminal and a second side opposite the first side. In one embodiment, a method includes (a) constructing an electrically conductive interconnect extending from the terminal to at least an intermediate depth in the substrate with the interconnect electrically connected to the terminal, and (b) removing material from the second side of the substrate so that a portion of the interconnect projects from the substrate.

REFERENCES:
patent: 2821959 (1958-02-01), Franz
patent: 3006318 (1961-10-01), Monroe, Jr. et al.
patent: 3345134 (1967-10-01), Heymer et al.
patent: 3865298 (1975-02-01), Allen et al.
patent: 3902036 (1975-08-01), Zaleckas
patent: 4040168 (1977-08-01), Huang
patent: 4368106 (1983-01-01), Anthony
patent: 4534100 (1985-08-01), Lane
patent: 4581301 (1986-04-01), Michaelson
patent: 4608480 (1986-08-01), Bizot et al.
patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4627971 (1986-12-01), Ayer
patent: 4660063 (1987-04-01), Anthony
patent: 4756765 (1988-07-01), Woodroffe
patent: 4768291 (1988-09-01), Palmer
patent: 4818728 (1989-04-01), Rai et al.
patent: 4907127 (1990-03-01), Lee
patent: 4959705 (1990-09-01), Lemnios et al.
patent: 4964212 (1990-10-01), Deroux-Dauphin et al.
patent: 4984597 (1991-01-01), McConnell et al.
patent: 5006922 (1991-04-01), McShane et al.
patent: 5024966 (1991-06-01), Dietrich et al.
patent: 5026964 (1991-06-01), Somers et al.
patent: 5027184 (1991-06-01), Soclof
patent: 5037782 (1991-08-01), Nakamura et al.
patent: 5098864 (1992-03-01), Mahulikar
patent: 5102829 (1992-04-01), Cohn
patent: 5123902 (1992-06-01), Muller et al.
patent: 5144412 (1992-09-01), Chang et al.
patent: 5145099 (1992-09-01), Wood et al.
patent: 5158911 (1992-10-01), Quentin et al.
patent: 5200366 (1993-04-01), Yamada et al.
patent: 5219344 (1993-06-01), Yoder, Jr.
patent: 5233448 (1993-08-01), Wu et al.
patent: 5237148 (1993-08-01), Aoki et al.
patent: 5289631 (1994-03-01), Koopman et al.
patent: 5291062 (1994-03-01), Higgins, III
patent: 5292686 (1994-03-01), Riley et al.
patent: 5294568 (1994-03-01), McNeilly et al.
patent: 5304743 (1994-04-01), Sen et al.
patent: 5378312 (1995-01-01), Gifford et al.
patent: 5378313 (1995-01-01), Pace
patent: 5380681 (1995-01-01), Hsu
patent: 5402435 (1995-03-01), Shiono et al.
patent: 5406630 (1995-04-01), Piosenka et al.
patent: 5424573 (1995-06-01), Kato et al.
patent: 5438212 (1995-08-01), Okaniwa et al.
patent: 5447871 (1995-09-01), Goldstein
patent: 5464960 (1995-11-01), Hall et al.
patent: 5481483 (1996-01-01), Ebenstein
patent: 5485039 (1996-01-01), Fujita et al.
patent: 5496755 (1996-03-01), Bayraktaroglu
patent: 5515167 (1996-05-01), Ledger et al.
patent: 5518956 (1996-05-01), Liu et al.
patent: 5550403 (1996-08-01), Carichner
patent: 5585308 (1996-12-01), Sardella
patent: 5585675 (1996-12-01), Knopf
patent: 5614743 (1997-03-01), Mochizuki
patent: 5618752 (1997-04-01), Gaul
patent: 5624437 (1997-04-01), Freeman et al.
patent: 5627106 (1997-05-01), Hsu
patent: 5646067 (1997-07-01), Gaul
patent: 5654221 (1997-08-01), Cronin et al.
patent: 5673846 (1997-10-01), Gruber
patent: 5684642 (1997-11-01), Zumoto et al.
patent: 5690841 (1997-11-01), Elderstig et al.
patent: 5718791 (1998-02-01), Spengler et al.
patent: 5723904 (1998-03-01), Shiga et al.
patent: 5726493 (1998-03-01), Yamashita et al.
patent: 5734555 (1998-03-01), McMahon
patent: 5771158 (1998-06-01), Yamagishi et al.
patent: 5773359 (1998-06-01), Mitchell et al.
patent: 5776824 (1998-07-01), Farnworth et al.
patent: 5807439 (1998-09-01), Akatsu et al.
patent: 5811799 (1998-09-01), Wu
patent: 5821532 (1998-10-01), Beaman et al.
patent: 5825080 (1998-10-01), Imaoka et al.
patent: 5826628 (1998-10-01), Hamilton
patent: 5847454 (1998-12-01), Shaw et al.
patent: 5851845 (1998-12-01), Wood et al.
patent: 5857963 (1999-01-01), Pelchy et al.
patent: 5861654 (1999-01-01), Johnson
patent: 5870289 (1999-02-01), Tokuda et al.
patent: 5870823 (1999-02-01), Bezama et al.
patent: 5893828 (1999-04-01), Uram
patent: 5904499 (1999-05-01), Pace
patent: 5969422 (1999-10-01), Ting et al.
patent: 5998240 (1999-12-01), Hamilton et al.
patent: 5998292 (1999-12-01), Black et al.
patent: 6004867 (1999-12-01), Kim et al.
patent: 6008070 (1999-12-01), Farnworth
patent: 6008914 (1999-12-01), Sasagawa et al.
patent: 6080291 (2000-06-01), Woodruff et al.
patent: 6097087 (2000-08-01), Farnworth et al.
patent: 6103547 (2000-08-01), Corisis et al.
patent: 6107180 (2000-08-01), Munroe et al.
patent: 6107186 (2000-08-01), Erb
patent: 6107679 (2000-08-01), Noguchi et al.
patent: 6110825 (2000-08-01), Mastromatteo et al.
patent: 6114240 (2000-09-01), Akram et al.
patent: 6119335 (2000-09-01), Park et al.
patent: 6124634 (2000-09-01), Akram et al.
patent: 6130141 (2000-10-01), Degani et al.
patent: 6133622 (2000-10-01), Corisis et al.
patent: 6137163 (2000-10-01), Kim et al.
patent: 6137182 (2000-10-01), Hause et al.
patent: 6140604 (2000-10-01), Somers et al.
patent: 6143588 (2000-11-01), Glenn
patent: 6148509 (2000-11-01), Schoenfeld et al.
patent: 6159764 (2000-12-01), Kinsman et al.
patent: 6180518 (2001-01-01), Layadi et al.
patent: 6184060 (2001-02-01), Siniaguine
patent: 6184465 (2001-02-01), Corisis
patent: 6187615 (2001-02-01), Kim et al.
patent: 6191487 (2001-02-01), Rodenbeck et al.
patent: 6203539 (2001-03-01), Shimmick et al.
patent: 6221769 (2001-04-01), Dhong et al.
patent: 6222136 (2001-04-01), Appelt et al.
patent: 6222270 (2001-04-01), Lee et al.
patent: 6228687 (2001-05-01), Akram et al.
patent: 6229202 (2001-05-01), Corisis
patent: 6235552 (2001-05-01), Kwon et al.
patent: 6246108 (2001-06-01), Corisis et al.
patent: 6252300 (2001-06-01), Hsuan et al.
patent: 6268114 (2001-07-01), Wen et al.
patent: 6271580 (2001-08-01), Corisis
patent: 6277757 (2001-08-01), Lin et al.
patent: 6291894 (2001-09-01), Farnworth et al.
patent: 6294837 (2001-09-01), Akram et al.
patent: 6297155 (2001-10-01), Simpson et al.
patent: 6324253 (2001-11-01), Yuyama et al.
patent: 6326689 (2001-12-01), Thomas
patent: 6326697 (2001-12-01), Farnworth
patent: 6329632 (2001-12-01), Fournier et al.
patent: 6341009 (2002-01-01), O'Connor et al.
patent: 6344976 (2002-02-01), Schoenfeld et al.
patent: 6359254 (2002-03-01), Brown
patent: 6359328 (2002-03-01), Dubin
patent: 6372548 (2002-04-01), Bessho et al.
patent: 6388208 (2002-05-01), Kiani et al.
patent: 6391770 (2002-05-01), Kosaki et al.
patent: 6406636 (2002-06-01), Vaganov
patent: 6432821 (2002-08-01), Dubin et al.
patent: 6433303 (2002-08-01), Liu et al.
patent: 6433304 (2002-08-01), Okumura et al.
patent: 6437284 (2002-08-01), Okamoto et al.
patent: 6437441 (2002-08-01), Yamamoto et al.
patent: 6441487 (2002-08-01), Elenius et al.
patent: 6444576 (2002-09-01), Kong
patent: 6448106 (2002-09-01), Wang et al.
patent: 6452270 (2002-09-01), Huang et al.
patent: 6455425 (2002-09-01), Besser et al.
patent: 6457515 (2002-10-01), Vafai et al.
patent: 6459039 (2002-10-01), Bezama et al.
patent: 6459150 (2002-10-01), Wu et al.
patent: 6468889 (2002-10-01), Iacoponi et al.
patent: 6486083 (2002-11-01), Mizuno et al.
patent: 6486549 (2002-11-01), Chiang et al.
patent: 6521516 (2003-02-01), Monzon et al.
patent: 6521530 (2003-02-01), Peters et al.
patent: 6534192 (2003-03-01), Abys et al.
patent: 6534863 (2003-03-01), Walker et al.
patent: 6545563 (2003-04-01), Smith
patent: 6555782 (2003-04-01), Isaji et al.
patent: 6560047 (2003-05-01), Choi et al.
patent: 6569711 (2003-05-01), Susko et al.
patent: 6569777 (2003-05-01), Hsu et al.
patent: 6572606 (2003-06-01), Kliewer et al.
patent: 6576531 (2003-06-01), Peng et al.
patent: 6580174 (2003-06-01), McCormick et al.
patent: 6582987 (2003-06-01), Jun et al.
patent: 6582992 (2003-06-01), Poo et al.
patent: 6593644 (2003-07-01), Chiu et al.
patent: 6599436 (2003-07-01), Matzke et al.
patent: 6606251 (2003-08-01), Kenny, Jr. et al.
patent: 6614033 (2003-09-01), Suguro et al.
patent: 6620031 (2003-09-01), Rent

Affiliated with

Also associated with

Rating

Microfeature workpieces and methods for forming... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microfeature workpieces and methods for forming..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfeature workpieces and methods for forming... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2664787