Stage yield prediction

Details Stage yield prediction Stage yield prediction

2011-06-14

2011-06-14

Whitmore, Stacy A (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Design of semiconductor mask or reticle

Analysis and verification

C700S121000

Reexamination Certificate

active

07962864

ABSTRACT:
In one embodiment, a method for predicting yield during the design stage includes receiving defectivity data identifying defects associated with previous wafer designs, and dividing the defects into systematic defects and random defects. For each design layout of a new wafer design, yield is predicted separately for the systematic defects and the random defects. A combined yield is then calculated based on the yield predicted for the systematic defects and the yield predicted for the random defects.

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