Integrated circuit isolation system

Details Integrated circuit isolation system Integrated circuit isolation system

2011-07-05

2011-07-05

Cao, Phat X (Department: 2814)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S222000, C257S506000, C257S510000

Reexamination Certificate

active

07972921

ABSTRACT:
A method of manufacturing a self-aligned inverted T-shaped isolation structure. An integrated circuit isolation system including providing a substrate, forming a base insulator region in the substrate, growing the substrate to surround the base insulator region, and depositing an insulator column having a narrower width than the base insulator region on the base insulator region.

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