Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2011-05-24
2011-05-24
Del Cotto, Gregory R (Department: 1761)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S313000, C430S317000, C430S270100, C427S128000, C427S129000
Reexamination Certificate
active
07947434
ABSTRACT:
The process of forming a plated film according to the invention is designed such that the surface asperities of the inorganic film formed by the tracing of a standing wave occurring at the inner wall surface of the first opening in the resist at the resist pattern-formation step are reduced or eliminated. It is thus possible to form, efficiently yet in a short period of time, a high aspect-ratio plated film portion having an aspect ratio of greater than 1. In addition, the formed plated film quality is extremely improved for the absence of pores (cavities).
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Hatate Hitoshi
Kamijima Akifumi
Yatsu Hideyuki
Del Cotto Gregory R
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
TDK Corporation
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