Thermally induced single-use valves and method of use

Fluid handling – Destructible or deformable element controlled – Heat destructible or fusible

Reexamination Certificate

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C137S067000, C251S011000

Reexamination Certificate

active

07958906

ABSTRACT:
In accordance with an embodiment of the present invention, a thermally induced single-use valve is provided including a silicon wafer having a top surface and a bottom surface and at least one cavity formed in the bottom surface of the wafer, a thermally deformable membrane suspended across the cavity on the top surface of the wafer and at least one resistive element patterned on top of the thermally deformable membrane.

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