Unit for transferring to-be-inspected object to inspection posit

Details Unit for transferring to-be-inspected object to inspection posit Unit for transferring to-be-inspected object to inspection posit

1996-11-21

1998-10-20

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

G01B 1100

Patent

active

058255001

ABSTRACT:
A transfer unit according to the invention employs a transfer member movable between a standby position and an inspection position, a detection unit provided at the transfer member for detecting the position of the object on a support surface of the transfer member, a rotatable mount member having a mount surface on which the object is mounted, and capable of transferring the object between the mount surface and the support surface of the transfer member, and a control unit for calculating an amount of deviation of the object from a reference position on the basis of a detection value of the detection unit, the control unit also driving the mount member and the transfer member to correct the amount of deviation of the object from the reference position on the basis of the calculation result.

REFERENCES:
patent: 5206627 (1993-04-01), Kato
patent: 5319216 (1994-06-01), Mokuo et al.
patent: 5331407 (1994-07-01), Doi et al.
patent: 5374147 (1994-12-01), Hiroki et al.
patent: 5409348 (1995-04-01), Suzuki

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