Method of making a resistor, method of making a diode, and SRAM

Details Method of making a resistor, method of making a diode, and SRAM Method of making a resistor, method of making a diode, and SRAM

1998-11-23

1999-12-28

Chang, Joni

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438382, H01L 218234

Patent

active

060080825

ABSTRACT:
Disclosed are methods of forming resistors and diodes from semiconductive material, and static random access memory (SRAM) cells incorporating resistors, and to integrated circuitry incorporating resistors and diodes. A node to which electrical connection is to be made is provided. An electrically insulative layer is provided outwardly of the node. An opening is provided in the electrically insulative layer over the node. The opening is filled with semiconductive material which depending on configuration serves as one or both of a vertically elongated diode and resistor.

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