Method of producing micromechanical structures

Details Method of producing micromechanical structures Method of producing micromechanical structures

1995-05-22

1997-01-21

Fourson, George

Fishing, trapping, and vermin destroying

437228, 437921, 216 2, H01L 21302

Patent

active

055959407

ABSTRACT:
In a method of producing micromechanical structures on semiconductor components, in particular on the surface of a wafer containing integrated circuits, provision is made for the micromechanical structures to be provided subsequently on a fully processed semiconductor component using process steps which are normally applied in semiconductor component production and are at most slightly modified, but independently of the semiconductor component production process.

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Tobata et al, "Monolithic Pressure Flow Sensor", IEEE Trans. on Elec. Dev., vol. ED-34, No. 12, Dec. 1987, pp. 2456-2462.
Petersen et al, "Micromechanical Accelerometer Integrated with MOS Detection Circuitry", IEEE Trans. on Elec. Dev., vol. ED-29, No. 1, Jan. 1982, pp. 23-27.

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