Scanning probe microscope using stored data for vertical probe p

Details Scanning probe microscope using stored data for vertical probe p Scanning probe microscope using stored data for vertical probe p

1994-02-25

1995-05-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, 369126, G01B 2130

Patent

active

054183634

ABSTRACT:
An apparatus and method for scanning a probe over a surface to either produce a measurement of the surface representative of a parameter other than the topography of the surface or to perform a task on the surface. The scanning operation is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform the task while the probe height is controlled using the stored topographic information.

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Article "Separation of magnetic and topographic effects in force microscopy" C. Schonenberger and S. F. Alvarado : 1990 American Institute of Physcis pp. 7278-7280.

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