Sample for transmission electron microscope analysis having no c

Details Sample for transmission electron microscope analysis having no c Sample for transmission electron microscope analysis having no c

1997-08-08

1999-11-02

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

059775432

ABSTRACT:
A method for manufacturing a transmission electron microscope analysis sample of a substrate containing an insulating body or an insulating sample includes the steps of: depositing a conductive material on the sample and then polishing the sample using a focused ion beam. The polishing step removes the conductive material from the analysis point of the sample, such that an electron projection and transmission path is formed through the sample at the analysis point. However, the conductive material is not removed from the remainder of the sample, not including the analysis point, thereby forming a ground path for any charges formed in the sample.

REFERENCES:
patent: 5124645 (1992-06-01), Rhoden et al.
patent: 5225683 (1993-07-01), Suzuki et al.
patent: 5440123 (1995-08-01), Ikeda
patent: 5525806 (1996-06-01), Iwasaki et al.

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