Electrostatic chuck with improved spacing and charge migration r

Details Electrostatic chuck with improved spacing and charge migration r Electrostatic chuck with improved spacing and charge migration r

1997-12-24

1999-03-23

Vinson, Brian N.

Equipment for production, distribution, or transformation of ene

Miscellaneous

1399

Patent

active

D04070739

REFERENCES:
patent: 4502094 (1985-02-01), Lewis et al.
patent: 4554611 (1985-11-01), Lewis
patent: 4665463 (1987-05-01), Ward et al.
patent: 5001594 (1991-03-01), Bobbio
patent: 5179498 (1993-01-01), Honough et al.
patent: 5459632 (1995-10-01), Birang et al.

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