Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1985-12-11
1987-07-21
Rosenberger, R. A.
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
350 68, 356398, G01N 2188, H05K 322, G01R 3128
Patent
active
046814531
ABSTRACT:
An optoelectric comparison apparatus for structures on plane surfaces or for planar structures has a laser light source 35 the operational light beam of which is split into two component beams 21, 22 by an optical displacement device 26, 25 for laterally displacing part of a beam. These two component light beams 21, 22 impinge on the mirror surfaces of a mirror wheel 11 obliquely to the axis of rotation 20. Two mutually crossed flat first strip mirrors 12, 13 are arranged in the direction of the light reflected from the mirror wheel 11 and each receive only one of the emergent component light beams 14, 15. The emergent component light beams 14, 15 are deflected in substantially opposite directions where, in each case, a further plane second strip mirror 16, 17 is provided which reflects the light to the scanning surface parallel to the light beams 14, 15 which enter into the first strip mirrors 12, 13.
REFERENCES:
patent: 3944369 (1976-03-01), Cuthbert et al.
patent: 4004153 (1977-01-01), Obser et al.
patent: 4013367 (1977-03-01), Nagao et al.
patent: 4065212 (1977-12-01), Belleson et al.
patent: 4421410 (1983-12-01), Karasaki
Erwin Sick GmbH - Optik-Elektronik
Rosenberger R. A.
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