Method of fabricating screen lens array plates

Details Method of fabricating screen lens array plates Method of fabricating screen lens array plates

1981-02-27

1983-12-06

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156628, 156647, 156657, 156662, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

044191820

ABSTRACT:
A method of fabricating lens and aperture array plates in silicon using photo or electron beam lithographic patterning followed by indiffusion of boron and anisotropic silicon etching and assembling to form screen lenses is disclosed.

REFERENCES:
patent: 3899711 (1975-08-01), Lemmond
patent: 3962052 (1976-06-01), Abbas et al.
patent: 4021276 (1977-05-01), Cho et al.
patent: 4200794 (1980-04-01), Newberry

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