Device for contact-free thickness measurement

Details Device for contact-free thickness measurement Device for contact-free thickness measurement

1977-11-30

1980-03-11

Corbin, John K.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

250224, 250560, 356 1, G01B 1106

Patent

active

041926129

ABSTRACT:
A device is disclosed for the contact free thickness measurement of an object. A light source produces a sharply bundled light ray which is divided into two light rays and simultaneously and periodically deflected so as to scan over opposite surfaces of the object. A reference detector determines a time t.sub.O at which two rays corresponding to a zero position of the light deflector strike the object. A first detector picks up light only along a first sighting line which intersects the object at a first point on one surface thereof. This first detector detects a time t.sub.A when one of the two light rays scans across the first point. A second detector picks up light only along a second sighting line which intersects the object at a second point on the one surface thereof. The second detector detects a time t.sub.B when the one light ray scans across the second point. A third detector is provided for picking up light only along a third sighting line which intersects the object at a third point on the opposite surface thereof. The third detector detects a third time t.sub.C when the other light ray scans across the third point. A measuring device is provided for computing distances of the first, second, and third points from a reference plane and for computing a thickness of the object therefrom.

REFERENCES:
patent: 3536405 (1970-10-01), Flower
patent: 3821558 (1974-06-01), Mansfield
patent: 4053227 (1977-10-01), Bodlaj
patent: 4068955 (1978-01-01), Bodlaj
Bodlaj, Dr. V. "Thickness, Distance & Velocity Measurements from Objects with the Aid of a Piezoelectric Laser Beam Deflector" Mess. & Pruf. (Germany) #12, 1972, pp. 778-782.

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