Substrate transferring apparatus

Details Substrate transferring apparatus Substrate transferring apparatus

1994-06-17

1995-08-29

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414937, B65G 6500

Patent

active

054454867

ABSTRACT:
According to the invention, there is provided a substrate transferring apparatus for transferring substrates from a substrate transport container containing a plurality of substrates to be treated to a substrate holder for holding a plurality of substrates to be treated or vice versa, the apparatus including arms for supporting substrate, a supporting member for supporting the arms, and a drive arrangement for driving the supporting member to operate. Each of the arms include a plate shaped arm main body having a connecting section for connecting the arm to the drive arrangement, supporting sections having a thickness greater than that of the arm main body for supporting corresponding peripheral areas of the substrate, and stoppers having a thickness greater than that of the supporting sections for abutting lateral sides of the substrate to rigidly hold the substrate.

REFERENCES:
patent: 4744709 (1988-05-01), Hertel et al.
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4901011 (1990-02-01), Koike et al.
patent: 5030056 (1991-07-01), Kitayama et al.
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5046164 (1991-09-01), Harima
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5074736 (1991-12-01), Ishii
patent: 5162047 (1992-11-01), Wada et al.
patent: 5177514 (1993-01-01), Ushijima et al.
patent: 5183370 (1993-02-01), Cruz
patent: 5217340 (1993-06-01), Harada et al.

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