4. Material or article handling
  5. Apparatus for moving material between zones having different...
  6. For carrying standarized mechanical interface type

Tetsu Oosawa

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Load-lock unit and wafer transfer system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Load-lock unit and wafer transfer system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Load-lock unit and wafer transfer system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Microwave plasma processing apparatus having a vacuum pump...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Substrate transfer apparatus and heat treatment system using the

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Patent

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Profile ID: LFUS-PAI-P-728251

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