Semiconductor device and method of manufacturing the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438372, 438375, 438235, 438309, H01L 218238

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active

059500808

ABSTRACT:
In a semiconductor device manufacturing method, a buried collector region (5) of a bipolar transistor is formed, and then born is ion-implanted into at least the lower portion of a graft base region (15) to form a region (10) having a low donor concentration, whereby the capacitance between the collector and the base of the bipolar transistor can be reduced to achieve a high-speed operation of a circuit.

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K. Ishimaru, et al, Bipolar Installed CMOS Technology without Any Process Step Increase for High Speed Cache SRAM,1995 IEEE, pp. 3,4,5,6, Japan.

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