Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1998-04-14
1999-09-07
Brown, Peter Toby
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438372, 438375, 438235, 438309, H01L 218238
Patent
active
059500808
ABSTRACT:
In a semiconductor device manufacturing method, a buried collector region (5) of a bipolar transistor is formed, and then born is ion-implanted into at least the lower portion of a graft base region (15) to form a region (10) having a low donor concentration, whereby the capacitance between the collector and the base of the bipolar transistor can be reduced to achieve a high-speed operation of a circuit.
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Brown Peter Toby
Duong Khanh
NEC Corporation
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