Radiant energy – Inspection of solids or liquids by charged particles
Patent
1997-01-14
1999-09-07
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
H01J 37352
Patent
active
059490705
ABSTRACT:
A scanning force microscope is disclosed which includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes a simplified mounting of laser and related adjustments and the locating of a detector independent of the scanner, to improve ease of handling and providing convenient locations for adjustments. In one preferred embodiment of the scanning force microscope, the surface of samples may be imaged while the cantilever portion of the scanner is immersed in liquids without special set-up or special adapters.
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Anderson Bruce C.
Shuster Michael J.
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