Stage system or device

Details Stage system or device Stage system or device

1996-03-15

1997-12-23

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

057012288

ABSTRACT:
A stage device or system comprising an electrostatic chuck portion having a substrate-mounted face made of ceramics, a support block continuous from the bottom of the electrostatic chuck portion and made integral to it, an insulating section for electrically insulating the electrostatic chuck portion from other members, at least an electrode embedded in the electrostatic chuck portion and serving to generate charge on the substrate-mounted face, when DC voltage is applied to it, to attract and hold a substrate on the face, and oxide or resistibility reducing materials added to the ceramics to reduce resistibility of the ceramics forming the electrostatic chuck portion to remove charge from the substrate-mounted face when the substrate is to be released from the face, wherein the amount of oxide or conductive particles contained in the ceramics becomes gradually smaller as it comes from the electrode nearer to the support block.

REFERENCES:
patent: 5382469 (1995-01-01), Kubota et al.
patent: 5384681 (1995-01-01), Kitabayashi et al.
patent: 5384682 (1995-01-01), Watanabe et al.
patent: 5463526 (1995-10-01), Mundt

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