Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1982-06-28
1984-03-27
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250399, H01J 3700
Patent
active
044396805
ABSTRACT:
A particle beam, such as that generated by a scanning electron microscope, impinges upon the specimen to be analyzed. The beam produces X-rays, the energy of which enables the various elements contained in the specimen to be identified. The detected X-ray energy is converted to rectangular electrical pulses, the height of which is proportional to the detected X-ray energy and hence characteristic of the element or elements present in the specimen. The pulse signals are coded so as to trigger or energize the several guns of a conventional color cathode ray tube, such as that used in a color televison receiver. The resulting multicolor map displayed on the screen of the cathode ray tube thus visually indicates to the observer the presence of certain elements and their relative position in the specimen being investigated.
REFERENCES:
patent: 3260845 (1966-07-01), Duncumb
patent: 3541233 (1970-11-01), Ayres
patent: 3628014 (1971-12-01), Grubic, Jr.
patent: 3813545 (1974-05-01), Barnhart et al.
patent: 4041311 (1977-08-01), Martin
patent: 4068123 (1978-01-01), Kokubo
patent: 4078178 (1978-03-01), Lowes
Anderson Bruce C.
Regents of the University of Minnesota
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