Method and apparatus for measuring the monocrystal diameter and

Details Method and apparatus for measuring the monocrystal diameter and Method and apparatus for measuring the monocrystal diameter and

1986-10-29

1989-05-23

Rosenberger, Richard A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356 72, 356375, G01B 1110

Patent

active

048324965

ABSTRACT:
A method and apparatus for measuring the diameter of a monocrystal during crucible drawing determines the brightness profile at the melt/monocrystal change-over point. The spacial position of maxima in the brightness profile in relation to a reference point indicates the diameter. The brightness profile is obtained by optically scanning the melt/monocrystal change-over point with a mirror rotating about a horizontal axis, applying the optical beam reflected by the rotating mirror to a row of photosensitive elements in parallel with the axis, and analyzing the outputs corresponding to the brightness profile for determining the diameter.

REFERENCES:
patent: 3493770 (1970-02-01), Dessauer et al.
patent: 3718757 (1973-02-01), Gulitz et al.
patent: 3812483 (1974-05-01), Graves
patent: 3886359 (1975-05-01), Cheek et al.
patent: 3958129 (1976-05-01), Clement et al.
patent: 4112469 (1978-09-01), Paranjpe et al.
patent: 4188544 (1980-02-01), Chasson
patent: 4207293 (1980-06-01), Scholl et al.
patent: 4239583 (1980-12-01), Hatch et al.
patent: 4242589 (1980-12-01), Sachs
patent: 4290835 (1981-09-01), Yates
Simms, T., "The Application of CCD's to Document Scanning", Microelectronics, vol. 7, No. 2, (Dec. 1975) pp. 60-63.
Hull et al., "Monitoring Diameter of Semiconductor Crystals During Automated Growth", IBM Technical Disclosure Bulletin, vol. 19, No. 3 (Aug. 1976) pp. 869-870.
Corburn et al., "Monitoring Lateral Dimensions of Semiconductor Crystals During Automated Growth", IBM Technical Disclosure Bulletin, vol. 15, No. 4 (Sep. 1972) pp. 1334-1335.
O'Kane et al., "Infrared TV System of Computer Controlled Czochralski Crystal Growth", Journal of Crystal Growth, 13/14 (May 1972) pp. 624-628.
Gartner et al., "An Electronic Device Including a TV-System for Controlling the Crystal Diameter During Czochrolski Growth", Journal of Crystal Growth, 13/14 (May 1972) pp. 619-623.

Affiliated with

Also associated with

Rating

Method and apparatus for measuring the monocrystal diameter and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for measuring the monocrystal diameter and , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for measuring the monocrystal diameter and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1726675