Exposure apparatus and method using pulsed light and changing me

Details Exposure apparatus and method using pulsed light and changing me Exposure apparatus and method using pulsed light and changing me

1996-06-25

1999-06-22

Moses, Richard

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 355 67, 355 71, G03B 2742, G03B 2752, G03B 2754, G03B 2772

Patent

active

059147733

ABSTRACT:
An exposure apparatus and device manufacturing method having structure and steps for projecting, for scan exposure of a substrate through an original, a plurality of light pulses from a pulse light source to the substrate through the original, changing an emitted light intensity of light pulses from the pulse light source during the scan exposure, and changing timing of light emission from the pulse light source during the scan exposure, whereby both the emitted light intensity and the timing of light pulses may be controlled during the scan exposure.

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