Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1996-05-20
1997-12-09
Evans, F. L.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
25055927, 2502014, G01B 1106
Patent
active
056965893
ABSTRACT:
An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors.
REFERENCES:
"Evaluation of a commercial microtopography sensor", In-Process Optical Metrology for Precision Machning, Proc. Soc. Photo. Instrum. Eng. vol. 802 (1987) pp. 165-169.
"Optical Displacement Sensors: H3065 Series", Hamamatsu Technical Data Sheet, Cat. No. KACC1003E01, Hamamatsu Corp. Bridgewater, NJ (1991).
"Contact and Noncontact Profilers", Optical Shop Testing, 2nd ed., K. Creath, et al, Wiley & Sons, Inc, (1992) pp. 696-714.
"Dynamically Focusing Electro-optical Sensor-System for Microprofilometry" Soc. Photo. Instrum. Eng. vol. 802 (1987) In-Process Optical Metrology for Precision Machining, pp. 170-173.
Evans F. L.
Larcher Earl L.
Lockheed Martin Energy Systems, Inc.
Spicer James M.
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