Semiconductor device and method of fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257344, 257345, H01L 2976, H01L 2954, H01L 31062, H01L 31113

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active

056964013

ABSTRACT:
An MOSFET has the essential feature lying in that the depths of well regions are different between a channel region and a diffusion region under a gate electrode to suppress charges in depletion layers. The MOSFET comprises a first well region which is formed in the channel region of a substrate below a gate electrode, and has a PN junction shallower than the sum of the width of a channel depletion layer formed by a voltage applied to the gate electrode and the width of a depletion layer formed by a substrate voltage of the substrate, and a second well region which is formed in source and drain regions to extend to the first well region, and has a PN junction deeper than the sum of the width of a depletion layer formed in the source or drain region and the width of a depletion layer formed in the first well region by the substrate voltage of the substrate.

REFERENCES:
patent: 4729001 (1988-03-01), Haskell
Proceedings of the IEDM--International Electron Devices Meeting, "High Performance SOIMOSFET Using Ultra-Thin SQI Film", Makoto Yoshimi et al., pp. 640-643, Dec. 6-9, 1987.
Symp. VLSI Tech. Dig. "High Speed and Highly Reliable Trench MOSFET with Dual-Gate", T. Mizuno et al., pp. 23-24, 1988.
Tomohisa Mizuno et al., High Performance Shallow Junction Well Transistor (SJET) published in Symp. VLSI Tech. Dig. (1991) pp. 109-110.

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