Method and apparatus for displaying process end point signal bas

Details Method and apparatus for displaying process end point signal bas Method and apparatus for displaying process end point signal bas

1990-01-16

1992-03-17

Lall, Parshotam S.

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364487, 364521, 364734, 340722, 324121R, 20429832, 156626, 156643, 395140, G06F 1520, H01L 21306

Patent

active

050974300

ABSTRACT:
A method facilitates the display of a filtered signal which represents the variation of light intensity in a processing chamber over time. The filtered signal filters out the effects of a magnetic field which causes plasma within the processing chamber to rotate. The magnetic field is generated by a signal with a period T. Light intensity within the process chamber is detected to produce a voltage signal with a voltage amplitude which varies based on the light intensity within the process chamber. The voltage amplitude of the voltage signal is digitally sampled at a sampling interval to obtain sample values. Running averages of a preselected number of sample values are calculated. The period T is set equal to the preselected number of sample values times the sampling interval times an integer. For each newly displayed running average, a rectangular box may be superimposed over a graph of the running averages in order to graphically display changes in slope. The computer is programmed to look for an anticipated sequence of slopes.

REFERENCES:
patent: 4479848 (1984-10-01), Otsubo et al.
patent: 4675072 (1987-06-01), Bennett et al.
patent: 4700311 (1987-10-01), Tributsch et al.
patent: 4789953 (1988-12-01), Gerrath
patent: 4846928 (1989-07-01), Dolins et al.
patent: 4847792 (1989-07-01), Barna et al.

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