Radiant energy – Inspection of solids or liquids by charged particles
Patent
1990-07-06
1991-06-18
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
050251538
ABSTRACT:
A scanning tunnel spectroscope comprises a generator for applying a bias voltage (V.sub.T) of a sin wave between a sample and probe, an I-V converter for converting a tunnel current flowing when the probe is set close to the sample, to a tunnel current representing voltage singal (I.sub.T), a detector for detecting the absolute value of the voltage signal (I.sub.t), and a servo circuit for servo-controlling a distance between the sample and probe using the absolute value with the servo time constant set larger than five times the period of the bias voltage. The information concerning the unevenness of the sample is obtained based on an output of the servo control means. A unit is provided for effecting the analog operation to derive a differential conductance based on the tunnel current on the real time basis and measuring the unevenness data and differential conductance between the sample and probe kept constant.
REFERENCES:
patent: 4870352 (1989-09-01), Koechner
patent: 4894537 (1990-01-01), Blackford et al.
Mikoshiba Nobuo
Morita Seizo
Okada Takao
Yagi Akira
Berman Jack I.
Nguyen Kiet T.
Olympus Optical Co,. Ltd.
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