Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1997-09-15
1999-11-09
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250397, 250398, H01J 37304
Patent
active
059819618
ABSTRACT:
An ion implanter for implanting ions into a substrate comprises an ion beam generator for generating a beam of ions, support means for carrying a substrate to be implanted with beam ions, scanning means for scanning at least one of the substrate and the ion beam relative to the other so that the beam traverses the substrate along a predetermined path. Monitoring means are arranged to monitor changes in the proportion of the ion beam cross-sectional area incident on the substrate as the ion beam traverses the edge of the substrate from a position in the scan at which the proportion is finite to a position at which the proportion is zero. The implanter further comprises detection means responsive to the monitoring means for detecting the moment when the proportion reaches zero from a finite value as the ion beam and/or substrate moves along the predetermined path, and operative means responsive to the detection means detecting the moment when the proportion of the beam cross-sectional area incident on the substrate reaches zero, for performing a subsequent operation in the ion implanter.
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Chamberlain Stephen S.
Cooke Richard
Edwards Peter I. T.
Kindersley Peter T.
Wright Christopher P.
Anderson Bruce C.
Applied Materials Inc.
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