4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Peter T. Kindersley

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Apparatus and method for improved scanning efficiency in an ion

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion implantation apparatus having increased source lifetime

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion implantation having increased source lifetime

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion implantation having increased source lifetime

Electric lamp and discharge devices – With positive or negative ion acceleration
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Profile ID: LFUS-PAI-P-62720

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