Optical monitor for direct thickness control of transparent film

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate

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356357, 356426, 427 10, G01B 1102

Patent

active

045824312

ABSTRACT:
Precise thickness control for high performance optical coatings is provided in an optical coating system utilizing an optical monitor. The optical monitor utilizes a light source and detecting arrangement that measures a sample optical element through the expedient of a light path altering structure that is not coincident with the axis of rotation of a deposition carrousel structure that supports optical elements being coated. The light source and detector arrangements can be mounted conveniently outside of the vacuum chamber of the optical coating system.

REFERENCES:
patent: 3036491 (1962-05-01), Schier
patent: 3645771 (1972-02-01), Ward
patent: 3737237 (1973-06-01), Zurasky

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