Ion scattering spectrometer

Details Ion scattering spectrometer Ion scattering spectrometer

1992-02-18

1993-01-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250305, H01J 37252

Patent

active

051824531

ABSTRACT:
In a coaxial impact collision ion scattering spectrometer (CAICISS), a Wien filter composed of a pair of electrodes 13 and a magnet 20 is placed in the flying path of the ions. The Wien filter acts as (a) a chopper for intermittently chopping ion beam irradiated onto the sample 17, and as (b) a filter that directs only ions having predetermined mass and electrical charges toward an aperture 16 and deviates other ions or non-ionized atoms from the aperture 16. Thus non-ionized atoms or impurity ions having different mass or electric charge are prevented from irradiating the sample 17. In another CAICISS, the axis A of the ion source 11 is set oblique to the axis B of the ion beam irradiated onto the sample 14, and only ions having predetermined mass and electrical charges are deflected from the axis A to the axis B by a pair of deflecting electrodes 13.

REFERENCES:
patent: 4100409 (1978-07-01), Brongersma
patent: 5068535 (1991-11-01), Rabalais
English Abstract of Japanese Laid-Open (Kokai) Patent Application No. 59-66043.

Affiliated with

Also associated with

Rating

Ion scattering spectrometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ion scattering spectrometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion scattering spectrometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1414126