Scanning tunneling microscopes with correction for coupling effe

Details Scanning tunneling microscopes with correction for coupling effe Scanning tunneling microscopes with correction for coupling effe

1990-04-18

1991-11-19

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, H01J 3700

Patent

active

050668587

ABSTRACT:
A scanning tunneling microscope is corrected in real time for coupling effects from the scanning electrodes or bias voltage circuit of the microscope on the tunneling current. In an automatic embodiment, a test voltage waveform is applied to the scanning electrodes or bias voltage circuit, the system determines the correction required and corrects the tunneling current signal. A method enables the operator to verify the correction. In other embodiments, predetermined values of the parameters of the coupling effects are entered by the operator; the system determines the correction required from these values and corrects the tunneling current signal with this correction; the correction is verified, and the operator enters an adjustment of the values, if the corrections did not sufficiently correct for the coupling effects.

REFERENCES:
patent: 4889988 (1989-12-01), Elings et al.
"Scanning Tunneling Microscopes Instrumentation", Kuk et al., Rev. Sci. Inst. vol. 60, No. 2, Feb. 1989, pp. 170-171.

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