Method of making a resistor, method of making a diode, and SRAM

Details Method of making a resistor, method of making a diode, and SRAM Method of making a resistor, method of making a diode, and SRAM

1996-08-01

2000-07-25

Smith, Matthew

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438382, H01L 218242

Patent

active

060935960

ABSTRACT:
Disclosed are methods of forming resistors and diodes from semiconductive material, and static random access memory (SRAM) cells incorporating resistors, and to integrated circuitry incorporating resistors and diodes. A node to which electrical connection is to be made is provided. An electrically insulative layer is provided outwardly of the node. An opening is provided in the electrically insulative layer over the node. The opening is filled with semiconductive material which depending on configuration serves as one or both of a vertically elongated diode and resistor.

REFERENCES:
patent: 4406051 (1983-09-01), Iizuka
patent: 4702937 (1987-10-01), Yamoto et al.
patent: 4829024 (1989-05-01), Klein et al.
patent: 4933739 (1990-06-01), Harari
patent: 4968645 (1990-11-01), Baldi et al.
patent: 5066605 (1991-11-01), Kasper et al.
patent: 5159430 (1992-10-01), Manning et al.
patent: 5177030 (1993-01-01), Lee et al.
patent: 5187114 (1993-02-01), Chan et al.
patent: 5241206 (1993-08-01), Lee et al.
patent: 5398200 (1995-03-01), Mazure et al.
patent: 5474948 (1995-12-01), Yamazaki
patent: 5521401 (1996-05-01), Zamanian et al.
patent: 5536960 (1996-07-01), Hayashi
patent: 5567644 (1996-10-01), Rolfson et al.
patent: 5589418 (1996-12-01), Kalnitsky
patent: 5602408 (1997-02-01), Watanabe et al.
patent: 5629240 (1997-05-01), Malladi et al.
patent: 5683930 (1997-11-01), Batra et al.
patent: 5732023 (1998-03-01), Roberts
patent: 5825074 (1998-10-01), Rolfson et al.
patent: 5831276 (1998-11-01), Gonzalez et al.
patent: 5892292 (1999-04-01), Easter
"Silicon Processing for the VLSI Era, vol. 1--Process Technology", by S. Wolf and R. N. Tauber, Lattice Press, pp. 137-138 and 189-191, 1986.
S. Wolf "Silicon Processing for the VLSI Era" vol. 1 -Process Technology 1986 pp. 137-138, 189-191.

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