Method for forming patterned diamond thin films

Details Method for forming patterned diamond thin films Method for forming patterned diamond thin films

1990-08-14

1992-01-21

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156613, 156614, 423446, C30B 2506

Patent

active

050825224

ABSTRACT:
Preferred embodiments mask select regions of a circuit surface (141) prior to abrading the surface with diamond particles to form nucleation sites (200). The mask (150) is then removed prior to forming a diamond layer (160). Diamond layer (160) grows on the surface except in those regions wherein the mask (150) prevented the formation of nucleation sites (200).

REFERENCES:
patent: 4380489 (1983-04-01), Beinvogl et al.
patent: 4740263 (1988-04-01), Imai et al.
"Crystallization of Diamond Crystals and Films by Microwave Assisted CVD, Part II", Mater Res. Bull, 23(4), pp. 531-548.

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