Scanning tunneling microscope having proper servo control functi

Details Scanning tunneling microscope having proper servo control functi Scanning tunneling microscope having proper servo control functi

1990-10-01

1991-10-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

050597930

ABSTRACT:
A scanning tunneling microscope includes a piezoelectric driver expanding and contracting according to a voltage applied thereto to adjust the distance between a sample and a probe. A servo circuit outputs a servo voltage to control the expansion and contraction of the piezoelectric driver to keep a tunnel current flowing between the sample and the probe at a constant value. A correction voltage generating circuit generates a given correction voltage to correct a voltage to be applied to the piezoelectric driver. An adding circuit adds the servo voltage and the correction voltage together and supplies an added output to the piezoelectric driver. A control circuit controls the correction voltage according to the servo voltage to set the added output to a given reference voltage.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4665313 (1989-05-01), Wells
patent: 4870352 (1989-09-01), Koechner
Rev. Sci. Instrum. 57(3), Mar. 1986.

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