Method for preventing corrosion of Al and Al alloys

Details Method for preventing corrosion of Al and Al alloys Method for preventing corrosion of Al and Al alloys

1980-05-09

1981-12-29

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

134 3, 134 28, 134 29, 134 30, 156646, 1566591, 156665, 204192EC, 204192E, 252 791, C23F 102, C23C 1500, C23G 102, B08B 3000

Patent

active

043080898

ABSTRACT:
Disclosed is a method for preventing corrosion of Al and Al alloys processed by the dry-etching method, which comprises (i) the step of sputtering Al or Al alloy in an ammonia-containing atmosphere and (ii) the step of washing the sputtered Al or Al alloy with an alkaline aqueous solution and then with water after termination of the step (i).
According to this method, corrosion of Al or Al alloy by halogen element-containing substances stuck to Al or Al alloy during the dry-etching treatment can be effectively prevented.

REFERENCES:
patent: 4148705 (1979-04-01), Battey
Kodak Microelectronics Seminar Proceedings Interface, 1977, Plasma Etching of Aluminum by Herndon et al., pp. 33-41.

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