4. Electricity: measuring and testing
  5. Measuring, testing, or sensing electricity, per se
  6. With rotor

Yutaka Akaike

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Aligner

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Aligner and method for inspecting semiconductor wafer using...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Ceramic mounting for wafer apparatus with thermal expansion...

Heat exchange – Heating and cooling – Heating and cooling of the same material
Reexamination Certificate

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Drivingly rotatable mechanism of specimen loading table and...

Measuring and testing – Inspecting
Reexamination Certificate

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Probe apparatus

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent

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Profile ID: LFUS-PAI-P-629604

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