4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Yusuke Fukuoka

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Plasma processing apparatus and semiconductor device...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor manufacturing apparatus and semiconductor...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Silicon-based thin-film photoelectric conversion device and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Thin film formation apparatus including engagement members...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2213375

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