4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Yuri Trachuk

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Low-frequency bias power in HDP-CVD processes

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for reducing charge density on a...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Method and apparatus for reducing charge density on a...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Method of sputtering a carbon protective film on a magnetic disk

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-533226

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