Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
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Low dielectric constant film produced from silicon compounds...
Low power method of depositing a low k dielectric with organo si
Method of depositing a low dielectric with organo silane
Method of depositing a low K dielectric with organo silane
Method of depositing a low k dielectric with organo silane
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