4. Data processing: generic control systems or specific application
  5. Generic control system, apparatus or process
  6. Optimization or adaptive control

Yun-Zong Tian

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Fuzzy control method for adjusting a semiconductor machine

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
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Method for finding the correlation between the tool PM and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method for monitoring fabrication parameter

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Profile ID: LFUS-PAI-P-2198632

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